Piezoelectric microactuator for dual stage control

Abstract

This paper presents a piezoelectric-based microactuator concept that could provide an economical and easily integrated option for dual stage actuation used in rigid disk drives (RDDs). The design and operation of a prototype version is described. Manufacturability of the actuator and its integration in the RDD assembly is assessed. Approaches to providing the voltages required to drive the microactuator to achieve displacement specifications are shown. A model for the dynamic performance is shown, and experimental results are presented. Issues involving dual-input single-output control loop integration are discussed.