Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology

Abstract

For the first time, this work demonstrates a switchless dual-frequency (472 MHz and 1.94 GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN microelectromechanical-systems resonator with coexisting <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">S</i> 0 and <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">S</i> 1 Lamb-wave modes of vibration. High performance (high quality factor <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Q</i> and electromechanical coupling factor <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for a resonator and low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In particular, 1.94-GHz operation has the best phase noise performance at 1-MHz offset when compared with all previously reported CMOS oscillators that work at a similar frequency.