Surface and Interface Analysis · 1994 · 18 citations · 5 references
Natural SciencesMaterials SciencePhysicsElectromagnetismElectronic MaterialsRadiation PhysicsCharge Carrier TransportCharged Particle TransportDevice SimulationElectron Beam PhysicsElectron TransportMonte Carlo Transport MethodsCharge DistributionCharge Distribution ModelingCharge Transport ModelingDouble Layer ModelingDouble Layer TheoryElectron DiffusionElectron Transport SimulationMonte Carlo Electron Transport
Abstract We are dealing with the problem of the charge distribution within an insulator (present application: SiO 2 ) which is bombarded by a narrow electron beam. The electron trajectories within the sample are simulated via a single diffusion Monte‐Carlo method. A mathematical model is proposed for the potential and the charge density. The development of an electric field, a potential and the broadening of the incident beam are taken into account. These two last distributions appear to have a prominent effect. It is shown that the charge distribution tends to a double layer; the shape and thickness of positive and negative distributions are given.
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Scanning Microscopy Supplement 10, 1996.
Paul Monaghan · Journal of Microscopy · 1998 · 127 citations