IEEE Transactions on Microwave Theory and Techniques · 2005 · 106 citations · 14 references
EngineeringAutomotive EngineeringElectrical EngineeringAntennasMicroelectromechanical SystemsMicrofabricationAntenna ArraysBeam SteeringMems PackagingMems SwitchesRadar SystemsRf MemsManufacturabilityPhase ShiftersPhased Array AntennasPhased ArraysRf Mems PackagingRf Mems SwitchesRf Microelectromechanical SystemsWafer-level Packaging
Planar array antennas are attractive for use in future automotive radar systems due to their flexibility in design and control of radar beams. The complexity and cost of a radar front-end phased array can be decreased by applying a beam-steering/switching concept, which reduces the number of parallel RF and baseband signal paths. RF-microelectromechanical systems (MEMS) subsystems are employed because of their excellent RF properties and potential low-cost manufacturability. We present design considerations for prototypical automotive applications of RF-MEMS-based automotive radar front-ends using phased-array antennas based on phase shifters or a Rotman lens. The single RF-MEMS switch is optimized with respect to its RF and thermomechanical behavior taking into account automotive requirements. The respective RF-MEMS subsystems, i.e., phase shifters and single-pole-multiple-throw switching networks are presented in conjunction with packaging and mounting approaches. We evaluate two different wafer-level packaging technologies using glass-frit sealing or polymer sealing. Finally, functional packaged devices are demonstrated: a glass-frit-sealed and flip-chip-mounted RF-MEMS switch and a benzocyclobutene-packaged single-pole-quadruple-throw switch network.
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Foundations for Microwave Engineering
P.J.B. Clarricoats · Electronics and Power · 1967 · 2.7K citations