Applied Physics A · 2015 · 17 citations · 25 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsThin FilmsDopingOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsBoron IncorporationMagnetron SputteringSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide LayersZinc Oxide NanostructuresZinc Oxides
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Aluminum films deposited by rf sputtering
F. M. d’Heurle · Metallurgical Transactions · 1970 · 270 citations
Natural Sciences, Materials Engineering, Materials Science +13