A Prealigned Process of Integrating Optical Waveguides With Microfluidic Devices

Abstract

We present a novel technology to monolithically integrate buried heterostructure waveguides with microfluidic channels in a prealigned manner. The fabrication process produced sealed microfluidic channels, low-loss waveguides, and excellent waveguide-channel alignment. The resultant device allows efficient optical coupling between the channels and the waveguides. Thus, the waveguides can both deliver the optical power and collect the emitted light.