Titanium Printed Capacitors for Microminiaturization

Abstract

It is shown in this paper that by an appropriate cleaning and forming procedure titanium metal can be anodically oxidized to a low leakage current, which makes it possible to use this material for capacitor fabrication. Experimental data are given for the metal/oxide/metal thin-film capacitor. A new "printing" technique especially suited for the fabrication of film capacitors in printed microminiaturized electronic circuits is described for the forming of the dielectric oxide layer.