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Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

Materials EngineeringMagnetismMaterials ScienceEngineeringMagnetic Data StorageMagnetic MaterialSurface ScienceApplied PhysicsRf MagnetronThin Film Process TechnologyMagnetic Thin FilmsThin FilmsNbn Thin FilmsFabrication ParametersThin Film ProcessingMagnetic Medium