Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror

Abstract

We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.