Microsystem Technologies · 2014 · 15 citations · 17 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsSensorsUncertainty QuantificationMeasurement UncertaintyMems DesignMems ModelingMems ResonatorsMems SensorsThermal SensorsProbabilistic Uncertainty AnalysisResonant MemsResonator ModelingThermo-mechanical DesignVibration Modeling
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