Generation of the large current cluster ion beam

Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test Gas

O. F. Hagena, W. Obert · The Journal of Chemical Physics · 1972 · 880 citations

Natural Sciences, Physics, Condensed Matter Physics +12

Surface modification with gas cluster ion beams

Isao Yamada, W. L. Brown, J.A. Norhby et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 103 citations

Natural Sciences, Materials Engineering, Materials Science +14

Surface treatment of diamond films with Ar and O2 cluster ion beams

Noriaki Toyoda, N. Hagiwara, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 81 citations

Engineering, Materials Engineering, Materials Science +15

Surface modifications by gas cluster ion beams

Isao Yamada, Jiro Matsuo, Makoto Akizuki · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 51 citations

Natural Sciences, Materials Science, Physics +14

Reduction of boron transient enhanced diffusion in silicon by low-energy cluster ion implantation

N. Shimada, Takaaki Aoki, Jiro Matsuo et al. · Materials Chemistry and Physics · 1998 · 39 citations

Engineering, Materials Engineering, Materials Science +11