Publication | Open Access
Three-dimensional STEM for observing nanostructures
56
Citations
0
References
2001
Year
EngineeringMicroscopyThree-dimensional StemElectron MicroscopyMicroscopy MethodNanometrologyTransmission Electron MicroscopeDouble Spherical FulcraZno ParticlesMaterials SciencePhysicsNanotechnologyMicroanalysisNanostructuringNano ScaleNanophysicsNanomaterialsScanning Probe MicroscopyApplied PhysicsElectron MicroscopeNanostructures
A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.