Publication | Closed Access
Air-gap type film bulk acoustic resonator using flexible thin substrate
35
Citations
8
References
2004
Year
Acoustic MethodsMaterials ScienceAeroacousticsEngineeringFlexible ElectronicsMicrofabricationPhysical AcousticAcoustic MetamaterialApplied PhysicsAcoustic MaterialFlexible Thin SubstrateAcoustic TweezerAcoustic Wave Devices
| Year | Citations | |
|---|---|---|
Page 1
Page 1