Air-gap type film bulk acoustic resonator using flexible thin substrate

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Thin film bulk wave acoustic resonators (FBAR) for wireless applications

R. Ruby, P. Bradley, Yury Oshmyansky et al. · 2002 · 318 citations

Engineering, Electrical Engineering, Materials Science +13

Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

Q.X. Su, P. Kirby, E. Komuro et al. · IEEE Transactions on Microwave Theory and Techniques · 2001 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +14

Growth of highly <i>c</i>-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators

Si‐Hyung Lee, Jeon-Kook Lee, Ki Hyun Yoon · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +17

A noble suspended type thin film resonator (STFR) using the SOI technology

Hyun Ho Kim, Byeong‐Kwon Ju, Yun Hi Lee et al. · Sensors and Actuators A Physical · 2001 · 25 citations

Natural Sciences, Electrical Engineering, Materials Science +11