Preparation of ZnO films by atmospheric pressure chemical-vapor deposition using zinc acetylacetonate and ozone - Concepedia

Concepedia

Publication | Closed Access

Preparation of ZnO films by atmospheric pressure chemical-vapor deposition using zinc acetylacetonate and ozone

88

Citations

5

References

1999

Year

K. Haga, F. Katahira, H. Watanabe

Thin Solid Films

Materials ScienceChemical EngineeringEngineeringOxide ElectronicsZinc AcetylacetonateChemistryZno FilmsChemical Vapor Deposition

References

	Year	Citations

Page 1