Fast characterization of moving samples with nano-textured surfaces

Abstract

We characterize nano-textured surfaces by optical diffraction techniques\nusing an adapted commercial light microscope with two detectors, a CCD camera\nand a spectrometer. The acquisition and analyzing time for the topological\nparameters height, width, and sidewall angle is only a few milliseconds of a\ngrating. We demonstrate that the microscope has a resolution in the nanometer\nrange, also in an environment with many vibrations, such as a machine floor.\nFurthermore, we demonstrate an easy method to find the area of interest with\nthe integrated CCD camera.\n