A GaAs MMIC-based coupling RF MEMS power sensor with both detection and non-detection states

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A.W. van Herwaarden, P.M. Sarro · Sensors and Actuators · 1986 · 456 citations

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Jeremy Muldavin, Gabriel M. Rebeiz · IEEE Transactions on Microwave Theory and Techniques · 2000 · 362 citations

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A capacitive RF power sensor based on MEMS technology

Luis J. Fernández, Remco J. Wiegerink, J. Flokstra et al. · Journal of Micromechanics and Microengineering · 2006 · 114 citations · Full text

Engineering, Electrical Engineering, Microelectromechanical Systems +15

High-sensitivity microwave power sensor for GaAs-MMICimplementation

Alfons Dehé, Viktor Krozer, B. Chen et al. · Electronics Letters · 1996 · 78 citations

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Integrated microwave power sensor

Alfons Dehé, Viktor Krozer, K. Fricke et al. · Electronics Letters · 1995 · 69 citations

Engineering, Electrical Engineering, Microelectronics +16