Integrated microwave power sensor

Alfons Dehé, Viktor Krozer, K. Fricke, Harald Klingbeil, K. Beilenhoff, H.L. Hartnagel

Electronics Letters · 1995 · 69 citations · 2 references

Concepts

Abstract

A new MMIC compatible sensor that measures RF power transmitted over a 50 Ω coplanar waveguide is presented. The sensor is based on the thermoelectric effect in AlGaAs and GaAs/AlGaAs micromachining technology is used for realisation. A sensitivity of 1.1 V/W has been achieved with a reflection coefficient of 0.1 at 10 GHz, by a first realisation.

References

2