Journal of Applied Physics · 1991 · 85 citations · 9 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMaterials PhysicsSolid State PhysicsCurie TemperatureMagnetic Properties Of SolidsSuperconducting MaterialsSuperconducting Thin FilmsThin Film OxidationThin-film MaterialsCritical TemperatureEnergy Dispersive X-ray SpectroscopyEnergy-dispersive X-ray SpectroscopyHigh-temperature SuperconductorsMagnetron SputteringSputteringSuperconducting Critical TemperatureSuperconducting Properties
The critical parameters in the single-target magnetron sputtering of YBa2Cu3O7 have been identified and sufficiently optimized to allow the reproducible deposition of films with Tc’s of ≳90 K and Jc’s of ≫ 106 A/cm2 at 77 K. It was found that during film growth the bombardment of the YBa2Cu3O7 by energetic particles must be minimized and also a stronger oxidizing agent than molecular oxygen must be present to obtain films with these properties. Otherwise, films are deposited that, by x-ray diffraction and energy dispersive x-ray spectroscopy analyses, are indistinguishable from the highest-Tc 1:2:3 stoichiometric material but which have critical temperatures of ≪90 K. Films need not have 1:2:3 overall stoichiometry to have optimum superconducting properties. In such cases the excess elements are present as second-phase particles.
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