Concepedia

Publication | Closed Access

Amorphous W40Re40B20 diffusion barriers for <Si>/Al and <Si>/Cu metallizations

DOI

19

Citations

21

References

1993

Year

E. Kolawa, Xin Sun, J.S. Reid, Jen‐Sue Chen, M.−A. Nicolet, R. Ruiz
Thin Solid Films

References

YearCitations

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