Laser produced Ag ions for direct implantation

Abstract

The amount and properties of ions produced by laser ablation of Ag targets have been analyzed. The maximum ion current density jmax=21.0 mA and maximum charge state Ar37+ of the ions produced by a laser power density of about 1×1014 W cm−2 at 1.315 and 0.657 μm on an Ag target have been determined. Direct implantation of the Ag ions from the laser-produced plasma has also been studied. An implanted ion density of 3.5×1016 cm−2 at a depth of 500 nm in Al samples was determined by RBS.