Journal of The Electrochemical Society · 1979 · 23 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationOptical MaterialsOpticsOptical MetrologySilicon MaterialsSurface CharacterizationSurface MetrologySurface RoughnessSurface TextureOptical Surface ProfilometryOptical Surface Roughness MeasurementPolycrystalline SiliconSurface Roughness AnalysisSurface Roughness Measurement