Effects of Self-Assembled Monolayer and PFPE Lubricant on Wear Characteristics of Flat Silicon Tips

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17

Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

Bharat Bhushan · Microelectronic Engineering · 2006 · 403 citations

Engineering, Biomedical Engineering, Materials Science +12

Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

Roya Maboudian, W. Robert Ashurst, Carlo Carraro · Sensors and Actuators A Physical · 2000 · 377 citations

Engineering, Materials Engineering, Materials Science +15