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Growth of CdTe films on sapphire by molecular beam epitaxy
84
Citations
7
References
1983
Year
Materials ScienceMaterials EngineeringSemiconductorsOptical MaterialsEngineeringIi-vi SemiconductorCrystalline DefectsEpitaxial GrowthCrystal Growth TechnologySurface ScienceApplied PhysicsPulsed Laser DepositionThin FilmsCubic-phase Cdte FilmsMolecular Beam EpitaxyChemical Vapor DepositionCdte FilmsInitial Attempts
Results of initial attempts to grow cubic-phase CdTe films on sapphire by molecular beam epitaxy are reported. Depositions have been completed on (11̄02) R-plane, (12̄10) A-plane, and (0001) basal plane substrates. Substrate temperatures in the range 260–350 °C were employed along with deposition rates of 1.5–7.5 Å/s. Depositions on (11̄02) sapphire generally produced films containing some elements of the hexagonal phase, as disclosed by x-ray diffraction and UV reflectance measurements. Sharp cubic-phase epitaxy was obtained for thick (∼5 μm) CdTe films grown on (12̄10) and (0001) sapphire substrates. The epitaxial films are smooth and mirrorlike in appearance. Nomarski micrographs show a featureless CdTe surface.
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