Scanning auger electron microscopy at 30 nm resolution

J. A. Venables, C. J. Harland, B.A. Joyce

Philosophical magazine · 1976 · 55 citations · 6 references

Concepts

Abstract

Abstract Auger electron images and analysis have been obtained with a spatial resolution of 30 nm, using an ultra-high vacuum field emission scanning electron microscope fitted with a cylindrical mirror analyser. This represents a large improvement over currently available instruments, and has important implications for microstructural studies of surfaces.

References

6