Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process - Concepedia

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Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

103

Citations

10

References

2000

Year

P.-C. Eccardt, Kurt Niederer

EngineeringMicromachinesPower UltrasoundMicrofabricationMechanical EngineeringTransducer PrincipleUltrasound TransducersCmos Compatible ProcessAcoustic TweezerBiomedical EngineeringInstrumentationUltrasoundMicrofluidicsMicromachined Ultrasonic Transducer

References

	Year	Citations

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