Extreme ultraviolet broadband Mo∕Y multilayer analyzers

Abstract

Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5–11.7nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5–10.1nm wavelength range and 6.1% for one designed for 9.1–11.7nm. The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°–52° angular range at the fixed wavelength of 10.2nm and the mean s reflectivity is 6.2%.