Publication | Closed Access
Etching of InP-based MQW laser structure in a MOCVD reactor by chlorinated compounds
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Citations
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References
1998
Year
Materials ScienceMaterials EngineeringEngineeringOptical PropertiesApplied PhysicsLaser ApplicationsLaser MaterialLaser-assisted DepositionChlorinated CompoundsPulsed Laser DepositionPlasma EtchingOptoelectronicsMocvd Reactor
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