Sub10nm silicon field emitters produced by electron beam lithography and isotropic plasma etching - Concepedia

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Sub10nm silicon field emitters produced by electron beam lithography and isotropic plasma etching

23

Citations

3

References

1995

Year

S.E. Huq, L. Chen, P.D. Prewett

Microelectronic Engineering

Electrical EngineeringPlasma ElectronicsEngineeringElectron-beam LithographyPhysicsMicrofabricationNanoelectronicsIsotropic PlasmaBeam LithographyApplied PhysicsMicroelectronicsPlasma EtchingOptoelectronicsPlasma ProcessingElectron Beam Lithography

References

	Year	Citations

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