Concepedia

Publication | Closed Access

3D micromachining of SU-8 polymer with proton microbeam

DOI

20

Citations

2

References

2005

Year

J. Simčič, Primož Pelicon, Zdravko Rupnik, Marko Mihelič, A. Razpet, D. Jenko
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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