Residual stress in silicon nitride films

Intrinsic Optical Absorption in Single-Crystal Germanium and Silicon at 77°K and 300°K

W. C. Dash, Roger H. Newman · Physical Review · 1955 · 1K citations

Natural Sciences, Materials Science, Condensed Matter Physics +16

Velocities and Densities of Dislocations in Germanium and Other Semiconductor Crystals

Ayan Roy Chaudhuri, J. R. Patel, L. G. Rubin · Journal of Applied Physics · 1962 · 215 citations

Natural Sciences, Materials Science, Physics +17

Determination of Stress in Films on Single Crystalline Silicon Substrates

R. Glang, R. A. Holmwood, R. Rosenfeld · Review of Scientific Instruments · 1965 · 135 citations

Natural Sciences, Materials Engineering, Materials Science +17

Kinetics of Thermal Growth of Ultra-Thin Layers of SiO[sub 2] on Silicon

Y. J. von der Meulen · Journal of The Electrochemical Society · 1972 · 110 citations

Natural Sciences, Materials Engineering, Materials Science +17

The Effects of Trace Amounts of Water on the Thermal Oxidation of Silicon in Oxygen

E. A. Irene · Journal of The Electrochemical Society · 1974 · 108 citations

Natural Sciences, Chemistry, Materials Science +17