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Very high breakdown voltage and large transconductance realized on GaN heterojunction field effect transistors
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1996
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Wide-bandgap SemiconductorElectrical EngineeringModfet SampleEngineeringRecord High BreakdownHigh Voltage EngineeringField Effect TransistorsSemiconductor DeviceApplied PhysicsPower Semiconductor DeviceAluminum Gallium NitrideGan Power DevicePower ElectronicsLarge TransconductanceMicroelectronicsHigh Breakdown VoltagePower Electronic Devices
We report record high breakdown voltages up to 340 and 230 V realized on unintentionally doped (1.5 μm gate length) and Si doped (1 μm gate length) AlGaN/GaN modulation doped field effect transistors (MODFETs), respectively. The devices also have large transconductances up to 140 mS/mm and a full channel current of 150–400 mA/mm. The Si doped MODFET sample demonstrated a very high room temperature mobility of 1500 cm2/Vs. With these specifications, GaN field effect transistors as microwave power devices are practical.