Hydrogen-related Degradation and Recovery Phenomena in Pb(Zr,Ti)O₃ Capacitors with a Platinum Electrode

Abstract

Pb(Zr,Ti)O 3 capacitors with top platinum electrodes area subjected to hydrogen annealing from 300°C to 450°C. Both the remnant polarization and breakdown voltage were drastically degraded after hydrogen annealing, whereas the dielectric constant was found to be relatively stable. Capacitors recovered their characteristics before annealing after re-oxidation treatment. An interfacial degradation model with a platinum-catalysis reduction is proposed to explain these notable degradation phenomena.