Calibration of the photoluminescence technique for measuring B, P and Al concentrations in Si in the range 10¹²to 10¹⁵cm^-3using Fourier transform spectroscopy

Abstract

Calibrations are reported for measuring boron, phosphorus and aluminium concentrations in silicon by comparing the intensities of bound-exciton and free-exciton luminescence features. Particular attention has been directed towards investigating the effects of excitation density and instrumental resolution. The luminescence spectra have been corrected for the system response so that the calibrations are independent of the equipment used and are hence transferable. Fourier transform rather than dispersive spectroscopy has been employed to measure the luminescence spectra. Since Fourier transform photoluminescence spectroscopy is a relatively new technique, it is described in some detail.