P‐9: Numerical Analysis on Temperature Dependence of Characteristics of Amorphous In‐Ga‐Zn‐Oxide TFT

Hiromichi Godo, Daisuke Kawae, Shuhei Yoshitomi, Toshinari Sasaki, Shunichi Ito, Hiroki Ohara, Akiharu Miyanaga, Shunpei Yamazaki

SID Symposium Digest of Technical Papers · 2009 · 38 citations · 7 references

Concepts

Abstract

Abstract We fabricated inverted‐staggered amorphous In‐Ga‐Zn‐O (a‐IGZO) TFTs and measured temperature dependence of the TFT characteristics. A V th shift between 120°C and 180°C was as large as about 4 V. In the analysis with 2‐D numerical simulation, we could reproduce the measured result by assuming two kinds of donor‐like states as carrier generation sources.

References

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