Concepedia

On the Formation of Thick and Multiple Layer Simox Structures and their Applications

F. Namavar, E. Cortesi, Richard Soref, P. Sioshansi

MRS Proceedings · 1989 · 13 citations · 2 references

DOI

Concepts

References

2

Novel dielectric/silicon planar structures formed by ion beam synthesis

P.L.F. Hemment, K.J. Reeson, John A. Kilner et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 35 citations

, , +12

High-voltage CMOS SIMOX technology and its application to a BSH-LSI

Satοru Nakashima, Yasuhiro Maeda, Masahiro Akiya · IEEE Transactions on Electron Devices · 1986 · 26 citations

, , +16