Spectroscopic ellipsometry with synchrotron radiation

Abstract

The design, construction, and performance of an automatic photometric ellipsometer with rotating analyzer for the VUV region (5–30 eV) is described. The use of a synchrotron radiation source and triple-reflection polarizers makes this new spectral region accessible to spectroscopic ellipsometry. New dielectric function data are presented for InP(110), YBa2Cu3O7, and epitaxial CaF2/Si(111).