Publication | Closed Access
Computer simulation studies of low energy B implantation into amorphous and crystalline silicon
21
Citations
16
References
1993
Year
Device ModelingElectrical EngineeringCrystalline SiliconComputer Simulation StudiesEngineeringApplied PhysicsSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicroelectronicsSemiconductor Device
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