Concepedia

Membrane folding by helium ion implantation for three-dimensional device fabrication

William J. Arora, Sybren Sijbrandij, Lewis Stern, John Notte, Henry I. Smith, George Barbastathis

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 48 citations · 8 references

DOI

Concepts

Abstract

The authors demonstrate that silicon nitride membranes can be folded out of plane into three-dimensional structures by helium ion implantation. The folds have a radius of 1μm and can be directed both up or down by varying implant energy.

References

8

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