Precision Engineering · 2007 · 126 citations · 3 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationVibrationCnc MachiningDigital ManufacturingMachiningMicrofabrication ProcessesMicromachiningVibration ControlMachining ProcessesMachining StabilityMachining Technology
3
State of the Art of Micromachining
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