Journal of The Electrochemical Society · 1969 · 21 citations · 0 references
Natural SciencesMaterials EngineeringMaterials SciencePhysical ChemistrySemiconductor MaterialsSolid-state ChemistryNucleationSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsSolid-state ReactionsStates Of MatterNitride Thin FilmsSilicon DioxideSilicon NitrideSolid Solution FormationSolid-solution Thermodynamics