Concepedia

Structure of nitride film hard coatings prepared by reactive magnetron sputtering

R. Mănăilă, D. Biró, A. Dévényi, D. Fratiloiu, Radian Popescu, J.E. Totolici

Applied Surface Science · 1998 · 14 citations · 23 references

DOI

Concepts

References

23

Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms

D.C. McIntyre, J. E. Greene, G. Håkansson et al. · Journal of Applied Physics · 1990 · 536 citations

, , +17

Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method

Tsutomu Ikeda, Hiroshi Satoh · Thin Solid Films · 1991 · 304 citations

, , +17

Oxidation kinetics of TiN thin films

M. Wittmer, J. R. Noser, H. Melchior · Journal of Applied Physics · 1981 · 286 citations

, , +17

Microstructure and physical properties of polycrystalline metastable Ti0.5Al0.5N alloys grown by d.c. magnetron sputter deposition

G. Håkansson, J.‐E. Sundgren, D.C. McIntyre et al. · Thin Solid Films · 1987 · 238 citations

, , +16

Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

U. Wahlström, Lars Hultman, J.‐E. Sundgren et al. · Thin Solid Films · 1993 · 207 citations

, , +16