Concepedia

Publication | Closed Access

Materials modifications using a multi-ion beam processing and lithography system

DOI

11

Citations

13

References

2011

Year

Bill R. Appleton, Sefaattin Tongay, Maxime G. Lemaitre, Joel Fridmann, Paul Mazarov, Jason E. Sanabia, S. Bauerdick, L. Bruchhaus, Ryo Mimura, R. Jede
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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