Concepedia

A comparison of the characteristics of planar and cylindrical magnetrons operating in pulsed DC and AC modes

Peter Kelly, G.T. West, Y.N. Kok, James W. Bradley, Ian Swindells, Gregory Clarke

Surface and Coatings Technology · 2007 · 21 citations · 11 references

DOI

Concepts

References

11

The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge

James W. Bradley, H. Bäcker, Yolanda Aranda-Gonzalvo et al. · Plasma Sources Science and Technology · 2002 · 150 citations · Full text

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Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma

James W. Bradley, H. Bäcker, Peter Kelly et al. · Surface and Coatings Technology · 2001 · 136 citations · Full text

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Space and time resolved Langmuir probe measurements in a 100 kHz pulsed rectangular magnetron system

James W. Bradley, H. Bäcker, Peter Kelly et al. · Surface and Coatings Technology · 2001 · 94 citations · Full text

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Using pulsed direct current power for reactive sputtering of Al2O3

A. Belkind, Alfred Freilich, R. Scholl · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 74 citations

, , +13

Mid frequency sputtering — a novel tool for large area coating

J. Szczyrbowski, G. Teschner · Surface and Coatings Technology · 1997 · 61 citations

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