Surface and Coatings Technology · 1997 · 61 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsSurface PreparationThin-film DepositionRadio Frequency SputteringSputter DepositionSputteringSputtering ProcessesSputtering TechniquesSurface SputteringThin-film Coatings