Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma - Concepedia

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Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma

DOI Full Paper Access

135

Citations

20

References

2001

Year

James W. Bradley, H. Bäcker, Peter Kelly, R.D. Arnell

Surface and Coatings Technology

Substrate PositionEngineeringPhysicsNatural SciencesSpectroscopyApplied PhysicsApplied Plasma PhysicPlasma SciencePlasma PhysicsInstrumentationPlasma Application

References

	Year	Citations

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