Journal of Applied Physics · 1992 · 38 citations · 10 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthIii-v SemiconductorsSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor HeterostructuresWide Band Gap SemiconductorsAtomic Layer EpitaxyEpitaxial Film GrowthEpitaxial MaterialsHall ConductivityHall EffectMetalorganic Chemical Vapor DepositionPhotoluminescencePhotoluminescence Spectroscopy
We report the first epitaxial growth of Zn3P2. The Zn3P2 epitaxy was obtained on (100) GaAs and ZnSe/GaAs by metalorganic chemical vapor deposition at growth temperatures of 350–400 °C and V/II ratios above 0.8 using dimethylzinc and PH3. The stoichiometry was assessed by x-ray photoelectron spectroscopy at Zn/P=1.5. A Hall mobility of 310 cm2/Vs at 300 K was obtained with a hole concentration of 3.5×1016 cm−3 for Zn3P2 grown at 380 °C. The absorption edge deduced is 1.51 eV at 300 K. Photoluminescence data suggest four acceptor levels (45, 65, 86, and 104 meV at 12.8 K).
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E. A. Fagen · Journal of Applied Physics · 1979 · 187 citations
Defect dominated conductivity in Zn3P2
A. Catalano, R.B. Hall · Journal of Physics and Chemistry of Solids · 1980 · 77 citations
Deposition and properties of zinc phosphide films
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