Improved aging performance of vapor phase deposited hydrophobic self-assembled monolayers

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

Self-Assembly Is Not the Only Reaction Possible between Alkyltrichlorosilanes and Surfaces:  Monomolecular and Oligomeric Covalently Attached Layers of Dichloro- and Trichloroalkylsilanes on Silicon

Alexander Y. Fadeev, Thomas J. McCarthy · Langmuir · 2000 · 605 citations

Natural Sciences, Chemistry, Materials Science +17

Silanization of Solid Substrates: A Step Toward Reproducibility

Jean-Bruno Brzoska, Issam Ben Azouz, F. Rondelez · Langmuir · 1994 · 578 citations

Natural Sciences, Chemistry, Materials Science +8

An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature

Atul N. Parikh, David L. Allara, Issam Ben Azouz et al. · The Journal of Physical Chemistry · 1994 · 447 citations

Natural Sciences, Chemistry, Materials Science +17

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17