Surface and Coatings Technology · 2001 · 97 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSurface EngineeringSurface ScienceForming ProcessesMachiningLayer UniformityNitride Thin FilmsNitrides Thin FilmsNitridingSilicon Nitride
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A two-dimensional model of dc glow discharges
Journal of Applied Physics · 1988 · 165 citations
Progress in the analysis of the mechanisms of ion nitriding
H. Michel, T. Czerwiec, M. Gantois et al. · Surface and Coatings Technology · 1995 · 160 citations