Applied Surface Science · 2014 · 13 citations · 43 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsCoating TechnologyCoatingsCrystal EngineeringSurface CoatingsSurface ModificationSurface PhysicsEpitaxial Growth KineticsFilm Growth MechanismsGrowth KineticsOxide Growth KineticsThin-film Growth Kinetics
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John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations
Natural Sciences, Materials Engineering, Materials Science +12
Atomic layer deposition of transition metals
Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 656 citations
Natural Sciences, Materials Engineering, Materials Science +11