Applied Physics Letters · 2014 · 40 citations · 19 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSemiconductor MaterialsThin FilmsAmorphous MaterialsSemiconductor PhysicsSemiconductor Thin FilmsThermal Properties Of SemiconductorsThin Film Thermal PropertiesThin-film MaterialsFilm ThicknessMagnetron SputteringMean Free PathPhonon Mean Free PathPhonon Thermal ConductivitySputteringThermal ConductivityThickness Dependence
We investigated phonons with long mean free paths (MFPs) in amorphous Si (a-Si) and amorphous Ge (a-Ge). The thermal conductivity of a-Si and a-Ge thin films prepared by magnetron sputtering was found to depend on film thickness and deposition temperature. From the film thickness dependence, we conclude that phonons with MFPs longer than 100 nm contribute to heat transport in a-Si and a-Ge. Also, as deposition temperature was increased, phonons with MFPs ranging from 100 to 250 nm in a-Si and from 15 to 250 nm in a-Ge increased.
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Stress-related effects in thin films
John A. Thornton, David W. Hoffman · Thin Solid Films · 1989 · 1.1K citations
Natural Sciences, Materials Engineering, Materials Science +14
Intrinsic lattice thermal conductivity of semiconductors from first principles
David Broido, Michael Malorny, G. Birner et al. · Applied Physics Letters · 2007 · 967 citations · Full text